METRO4-3D brings together 10 project partners active in the advanced metrology for 3D analysis. 

 

 

Partner Main tasks in Metro4-3D Contact
     
 

Project Coordination

WPL for concurrent metrology

Thierry Conard

Janusz Bogdanowicz

Ingrid De Wolf

Véronique De Halleux

Wilfried Vandervorst

  Evaluation of TOF-SIMS metrology

Jean-Paul Barnes

Nicolas Chevalier

 


WPL for assessment of Ghz-SAM

 

Sebastian Brand
 
Assessment of Ghz-SAM and acoustic waves simulations

Roland Brunner
 
WPL for assessment of CAPRES microRSP-A300

Hjorth Petersen

Dirch Hjorth Petersen

 
WPL for assessment of TOFSIMS

Hans Josef Hug

Laetitia Bernard

 
TOFSIMS instrument manufacturer: implementation of the results of the assessment

Rudolf Moellers
 

Micro RSP-A300 instrument manufacturer: implementation of the results of the assessment

WPL for dissemination

Henrik Hartmann Henrichsen
 

GHz-SAM instrument manufacturer: implementation of the results of the assessment

Peter Hoffrogge
 

Providing relevant test samples

Johan Vertommen

David Hellin

Dries Dictus